Investigation and optimization of optical and electric properties of indium-tin oxide films obtained by magnetron sputtering method at different oxygen flows

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Bibliographic Details
Published inVestnik. Seriâ fizičeskaâ Vol. 73; no. 2; pp. 42 - 49
Main Authors Zholdybaev, K.S., Kundyzbai, D.K., Aimaganbetov, K.P., Shongalova, A.K., Zhantuarov, S.R., Ongar, I.A., Tokmoldin, N.S.
Format Journal Article
LanguageEnglish
Russian
Published 25.06.2020
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ISSN:1563-0315
2663-2276
DOI:10.26577/RCPh.2020.v73.i2.05