Impact of Laser‐Induced Graphitization on Diamond Schottky Barrier Diodes

Schottky Barrier Diodes Laser dicing is applied for diamond Schottky barrier diodes (SBDs) to develop the back‐end process for future diamond electronics. The structural and electrical impact of laser‐induced graphitization which takes place during the laser‐dicing process is investigated by Shinya...

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Published inPhysica status solidi. A, Applications and materials science Vol. 219; no. 20
Main Authors Iwao, Tomoki, Sittimart, Phongsaphak, Yoshitake, Tsuyoshi, Umezawa, Hitoshi, Ohmagari, Shinya
Format Journal Article
LanguageEnglish
Published 01.10.2022
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Summary:Schottky Barrier Diodes Laser dicing is applied for diamond Schottky barrier diodes (SBDs) to develop the back‐end process for future diamond electronics. The structural and electrical impact of laser‐induced graphitization which takes place during the laser‐dicing process is investigated by Shinya Ohmagari and colleagues in article number 2100846. Herein, an appropriate measure to minimize the influence of laser dicing on SBD properties is proposed.
ISSN:1862-6300
1862-6319
DOI:10.1002/pssa.202270043