Characterising and tackling thermally induced zero-drift in displacement measuring interferometry using temperature-controlled enclosure

• Published in: Measurement science & technology Vol. 35; no. 11; p. 115011
• Main Authors: Rerucha, Simon, Hola, Miroslava, Cip, Ondrej, Lazar, Josef, Oulehla, Jindrich, Mikel, Bretislav
• Format: Journal Article
• Language: English
• Published: 01.11.2024
• ISSN: 0957-0233; 1361-6501
• DOI: 10.1088/1361-6501/ad646b

Abstract Our research efforts in displacement measurement interferometry focused on long-term drifts initiated an extended experimental investigation in the interferometric assemblies of our design. We aimed to analyze, characterize and tackle the long-term measurement stability, expressed as the zero-drift , with particular attention to the thermal effects. For the experimentation, we developed a thermostatic chamber equipped with active temperature regulation, an array of sensors and control electronics. With either the finely stabilized temperature or with the thermal cycling, we can carry out a range of investigations: verification of modified design or prototype interferometers, testing of production pieces, characterization of integrated assemblies and units in terms of the zero drift and the susceptibility to thermal effects—the temperature sensitivity ( δ L / δ T , expressed in nm ⋅ K −1 ). With these experimental studies, we demonstrate the potential of the zero drift studies to contribute to the development and broader expansion of interferometric instrumentation.