Introduction of Ion Milling System and Its Application

Saved in:
Bibliographic Details
Published inHyōmen gijutsu Vol. 66; no. 12; pp. 581 - 585
Main Authors Kaneko, Asako, Takasu, Hisayuki
Format Journal Article
LanguageEnglish
Japanese
Published The Surface Finishing Society of Japan 01.12.2015
Subjects
Atmosphere Shield System
Cooling Milling
Cross-section Milling
Flat Milling
Ion Milling System
SEM
Online AccessGet full text

Cover

More Information
ISSN:0915-1869
1884-3409
DOI:10.4139/sfj.66.581