Determination of the two-dimensional distribution of potentials in integrated circuits by the laser scanning method

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Bibliographic Details
Published inSoviet journal of quantum electronics Vol. 18; no. 8; pp. 1044 - 1046
Main Authors Angelova, L A, Kravchenko, L N, Sagiyan, G M
Format Journal Article
LanguageEnglish
Published IOP Publishing 31.08.1988
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ISSN:0049-1748
2169-530X
DOI:10.1070/QE1988v018n08ABEH012407