A model for calculating the composition of GaAs x P1–x solid solutions under metalorganic vapor phase epitaxy conditions

A model is proposed for calculating the composition of GaAsxP1–x solid solutions, based on the iterative determination of the equilibrium partial pressures of the pyrolysis products of the starting reagents, followed by calculation of the composition of the solid solution in an adsorption–desorption...

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Bibliographic Details
Published inInorganic materials Vol. 53; no. 4; pp. 369 - 375
Main Authors Maksimov, A. D., Eistrikh-Geller, V. Yu, Marmalyuk, A. A., Ladugin, M. A., Bagaev, T. A., Gorlachuk, P. V., Yarotskaya, I. V.
Format Journal Article
LanguageEnglish
Published New York Springer Nature B.V 01.04.2017
Subjects
Solid solutions
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Summary:A model is proposed for calculating the composition of GaAsxP1–x solid solutions, based on the iterative determination of the equilibrium partial pressures of the pyrolysis products of the starting reagents, followed by calculation of the composition of the solid solution in an adsorption–desorption model. The proposed model ensures good agreement between calculation results and experimental data.
ISSN:0020-1685
1608-3172
DOI:10.1134/S0020168517040124