Fabrication of phase-change chalcogenide Ge_2Sb_2Te_5 patterns by laser-induced forward transfer
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Published in | Optics express Vol. 19; no. 18; p. 16975 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
28.08.2011
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Online Access | Get full text |
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ISSN: | 1094-4087 1094-4087 |
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DOI: | 10.1364/OE.19.016975 |