Investigation of titanium nitride films prepared by Xe+ ion beam enhanced deposition in a N2 gas environment

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Bibliographic Details
Published inVacuum Vol. 42; no. 16; p. 1089
Main Authors Xi, Wang, Genqing, Yang, Zhihong, Zheng, Wei, Huang, Zuyao, Zhou, Xianghuai, Liu, Shichang, Zou
Format Journal Article
LanguageEnglish
Published 1991
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ISSN:0042-207X
DOI:10.1016/0042-207X(91)91448-W