XPS study of BZT thin film deposited on Pt/Ti/SiO2/Si substrate by pulsed laser deposition

• Published in: Transactions of Nonferrous Metals Society of China Vol. 17; no. A02; pp. 862 - 865
• Main Author: 蒋艳平 唐新桂 刘秋香 程铁栋 周益舂
• Format: Journal Article
• Language: English
• Published: 01.11.2007
• Subjects: BZT薄膜; 化学状态; 脉冲激光沉积; 铂/钛/二氧化硅/硅基底
• ISSN: 1003-6326

Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba（Zr0.25Ti0.75）O3 thin film was grown on Pt/Ti/SiOdSi（100） substrates by pulsed laser deposition. Structure and surface morphology of the thin film were studied by X-ray diffractometry （XRD） and scan electronic microscopy （SEM）. The composition and chemical state near the film surface were obtained by X-ray photoelectron spectroscopy （XPS）. On the sample surface, O 1 s spectra can be assigned to those from the lattice and surface adsorbed oxygen ions, while Cls only result from surface contamination. The result shows that only one chemical state is found for each spectrum of Ba 3d, Zr 3d and Ti 2p photoelectron in the BZT thin film.