Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens
The multilayer Laue lens （MLL） is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 μm-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first deposit...
Saved in:
| Published in | 中国物理C：英文版 no. 2; pp. 98 - 101 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.02.2013
|
| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-1137 0254-3052 |
| DOI | 10.1088/1674-1137/37/2/028002 |
Cover
Loading…
| Abstract | The multilayer Laue lens （MLL） is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 μm-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current （DC） magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35–41 μm. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility （SSRF）. One-dimensional （1D） focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale. |
|---|---|
| AbstractList | The multilayer Laue lens （MLL） is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 μm-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current （DC） magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35–41 μm. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility （SSRF）. One-dimensional （1D） focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale. |
| Author | 黄秋实 李浩川 宋竹青 朱京涛 王占山 李爱国 闫帅 毛成文 王华 闫芬 张玲 余笑赛 刘鹏 李明 |
| AuthorAffiliation | Key Laboratory of Advanced Micro-structured Materials, MOE, Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092, China Shanghai Synchrotron Radiation Facility, Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201204, China Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China |
| Author_xml | – sequence: 1 fullname: 黄秋实 李浩川 宋竹青 朱京涛 王占山 李爱国 闫帅 毛成文 王华 闫芬 张玲 余笑赛 刘鹏 李明 |
| BookMark | eNo9jt1Kw0AUhBepYFp9BGF9gDVn_zeXUqwVAoJR1KuySXbblWSjSXqRt2_AIgwMnJnzMUu0iF10CN1SuKdgTEqVFoRSrtNZLAVmANgFSoBJQThItkDJf-cKLYfhG0CJ-TVBX1vb1_iT9HbCMxXXoXVxCF20DY42dsR31XEIcY_tiMeDw0XxusHnC_4oAkuLgNtjM4bGTq7HuT063MyMa3TpbTO4m7Ov0Pvm8W29JfnL0_P6IScVpXQkmnLmmZZcGSull957ITJW11BWc6CY5pW3yuqsNoqWErhgjpfagS9ZRj1fobs_bnXo4v53Hrb76UNr-2knhIZMaMNPEBJUgw |
| ContentType | Journal Article |
| DBID | 2RA 92L CQIGP ~WA |
| DOI | 10.1088/1674-1137/37/2/028002 |
| DatabaseName | 维普期刊资源整合服务平台 中文科技期刊数据库-CALIS站点 维普中文期刊数据库 中文科技期刊数据库- 镜像站点 |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Physics |
| DocumentTitleAlternate | Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens |
| EISSN | 0254-3052 |
| EndPage | 101 |
| ExternalDocumentID | 44709478 |
| GroupedDBID | 02O 1JI 1WK 29B 2B. 2C. 2RA 4.4 5B3 5GY 5VR 5VS 7.M 92E 92I 92L 92Q 93N AAGCD AAGID AAJIO AAJKP AALHV AATNI ABCXL ABHWH ABJNI ACAFW ACGFS ACHIP AENEX AFUIB AFYNE AIBLX AKPSB ALMA_UNASSIGNED_HOLDINGS ATQHT BBWZM CCEZO CCVFK CEBXE CHBEP CJUJL CQIGP CRLBU CW9 DU5 EBS EDWGO EJD EPQRW EQZZN ER. FA0 FEDTE HVGLF IJHAN IOP IZVLO JCGBZ KNG KOT M45 N5L NT- NT. OK1 PJBAE Q02 RIN RNS ROL RPA RW3 SY9 TCJ TGP W28 ~WA |
| ID | FETCH-LOGICAL-c111t-7132f275368a55f5fff4492dd0bc2f26273cfa6a79d861b50342e3b7e0fb291f3 |
| ISSN | 1674-1137 |
| IngestDate | Wed Feb 14 10:43:55 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 2 |
| Language | English |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c111t-7132f275368a55f5fff4492dd0bc2f26273cfa6a79d861b50342e3b7e0fb291f3 |
| Notes | HUANG Qiu-Shi, LI Hao-Chuan, SONG Zhu-Qing, ZHU Jing-Tao ,WANG Zhan-Shan, LI Ai-Guo, YAN Shuai, MAO Cheng-Wen,WANG Hua,YAN Fen, ZHANG Ling,YU Xiao-Han,LIU Peng, LI Ming（1 Key Laboratory of Advanced Micro-structured Materials, MOE, Institute of Precision Optical Engineering Department of Physics, Tongji University, Shanghai 200092, China 2 Shanghai Synchrotron Radiation Facility, Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201204, China 3 Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China ） 11-5641/O4 nano-focusing, hard X-ray, multilayer Laue lens, synchrotron radiation, diffraction The multilayer Laue lens （MLL） is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 μm-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current （DC） magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35–41 μm. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility （SSRF）. One-dimensional （1D） focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale. |
| PageCount | 4 |
| ParticipantIDs | chongqing_primary_44709478 |
| PublicationCentury | 2000 |
| PublicationDate | 2013-02-01 |
| PublicationDateYYYYMMDD | 2013-02-01 |
| PublicationDate_xml | – month: 02 year: 2013 text: 2013-02-01 day: 01 |
| PublicationDecade | 2010 |
| PublicationTitle | 中国物理C：英文版 |
| PublicationTitleAlternate | Chinese Physica C |
| PublicationYear | 2013 |
| SSID | ssj0064088 |
| Score | 1.9287413 |
| Snippet | The multilayer Laue lens （MLL） is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9... |
| SourceID | chongqing |
| SourceType | Publisher |
| StartPage | 98 |
| SubjectTerms | SSRF 一维 劳厄 对焦 硬X射线 纳米尺度 衍射光学元件 镜头 |
| Title | Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens |
| URI | http://lib.cqvip.com/qk/92043A/201302/44709478.html |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnR1db9Mw0NqGkHhBfArGh_zAPUVZm8Sfj0nraiDxIbqJ8TQlaQKVUAtb9wB_gT_NnZ1mmYYQIEWWa5_vzudc7uzaZ8ZeCKuzJlng3MQYEQvdVHEp8WemE6sbrMxaWu94_UYdHotXJ_JkZ_fnYNfSxaY6qH_89lzJ_4wqluG40inZfxjZHikWYB7HF1McYUz_aozpb_foJD4rv0drdBYXFKk_RNmIVuVqHbfr-sKvBYQTi9F8_n4WdSXRh_mSoqLOl2FT4ZcSnW86Jt1EaIjOh04rOAGFgXwKToItoMCMBmMht5SxYzBqAm4GxQRsDs6AQaAEnAKrwOgO2vS7ZsFZKAowgmpyTeCIOXdgXeRbTcE4yhTS05BQIJlp1EEROLZDGpYwIbRNQ7uJJ4vc5pBPPAIsLCLPgOvImCnkY48zwWdID4GMR9D1MvLYPSUCx25JD57PqB4zCI6d33bzGhnjhhiwOXHlO4GCIh48eEG8CxKq9eJExm1C4IUMvEtPx3ihoRRnV0WEFcYN127oHo1-H0wwN0qLOElC2JuDJnz2ccoe41c4HWhfOjAx4dLuzllJArZrdhBtBy3JbNFj3iepjyNCc4RL899vyhRC41xfm112I8U5F1m5l2_fbd0aJcb-Etce5_Y4nDGjvmyETzoKFChYyef16tM3fKkHLtvRHXa7m2vxPCjOXbbTrO6xm37Pc31-n30k9eFefTiqDx-oD7-iPrzccFQfTurDuxJO6jOaL_ml8nBSHk7K84Adz9zR5DDubhqJa7T1m1gnWdqmOHNXppSylW3bCmHTxWJc1Vih0Mev21KV2i6MSipJcTObrNLNuK1Sm7TZQ7a3Qk4fMS6VqFWmF9JUlRCNrCq0gLVqk8aMy7bJHrP9XiynX0NEmdOt6Pf_VPmE3bp8h56yvc3ZRfMMPeJN9dyP1C_Tinri |
| linkProvider | IOP Publishing |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Hard+X-ray+one+dimensional+nano-focusing+at+the+SSRF+using+a+WSi2%2FSi+multilayer+Laue+lens&rft.jtitle=%E4%B8%AD%E5%9B%BD%E7%89%A9%E7%90%86C%EF%BC%9A%E8%8B%B1%E6%96%87%E7%89%88&rft.au=%E9%BB%84%E7%A7%8B%E5%AE%9E+%E6%9D%8E%E6%B5%A9%E5%B7%9D+%E5%AE%8B%E7%AB%B9%E9%9D%92+%E6%9C%B1%E4%BA%AC%E6%B6%9B+%E7%8E%8B%E5%8D%A0%E5%B1%B1+%E6%9D%8E%E7%88%B1%E5%9B%BD+%E9%97%AB%E5%B8%85+%E6%AF%9B%E6%88%90%E6%96%87+%E7%8E%8B%E5%8D%8E+%E9%97%AB%E8%8A%AC+%E5%BC%A0%E7%8E%B2+%E4%BD%99%E7%AC%91%E8%B5%9B+%E5%88%98%E9%B9%8F+%E6%9D%8E%E6%98%8E&rft.date=2013-02-01&rft.issn=1674-1137&rft.eissn=0254-3052&rft.issue=2&rft.spage=98&rft.epage=101&rft_id=info:doi/10.1088%2F1674-1137%2F37%2F2%2F028002&rft.externalDocID=44709478 |
| thumbnail_s | http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fimage.cqvip.com%2Fvip1000%2Fqk%2F92043A%2F92043A.jpg |