Single-Step RIE Fabrication Process of Low Loss InP Waveguide Using CH[sub 4]∕H[sub 2] Chemistry

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 158; no. 3; p. H281
Main Authors Lysevych, M., Tan, H. H., Karouta, F., Jagadish, C.
Format Journal Article
LanguageEnglish
Published 2011
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ISSN:0013-4651
DOI:10.1149/1.3532767