Micro/Nano Fabrication Technique by Softlithography
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Published in | Kobunshi Vol. 53; no. 5; p. 341 |
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Main Authors | , |
Format | Journal Article |
Language | Japanese English |
Published |
The Society of Polymer Science, Japan
01.05.2004
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Online Access | Get full text |
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ISSN: | 0454-1138 2185-9825 |
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DOI: | 10.1295/kobunshi.53.341 |