P‐101: Zero‐cost solution for TFT Panel non‐film surface strength improvement
The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of...
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Published in | SID International Symposium Digest of technical papers Vol. 55; no. 1; pp. 1775 - 1777 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Campbell
Wiley Subscription Services, Inc
01.06.2024
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Subjects | |
Online Access | Get full text |
ISSN | 0097-966X 2168-0159 |
DOI | 10.1002/sdtp.17918 |
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Abstract | The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of ESC (Electrostatic Chuck) used for dry etching. |
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AbstractList | The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of ESC (Electrostatic Chuck) used for dry etching. |
Author | Wang, Guangjun Liu, Bo Huang, Jian Xiong, Yong Gao, Caiyong Tan, Luolin Xiang, Lei Wen, Huiming |
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SubjectTerms | ESC for dry etching Screens Withstand drop strength Zero-cost |
Title | P‐101: Zero‐cost solution for TFT Panel non‐film surface strength improvement |
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