P‐101: Zero‐cost solution for TFT Panel non‐film surface strength improvement

The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of...

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Published inSID International Symposium Digest of technical papers Vol. 55; no. 1; pp. 1775 - 1777
Main Authors Wen, Huiming, Xiang, Lei, Wang, Guangjun, Xiong, Yong, Gao, Caiyong, Liu, Bo, Huang, Jian, Tan, Luolin
Format Journal Article
LanguageEnglish
Published Campbell Wiley Subscription Services, Inc 01.06.2024
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ISSN0097-966X
2168-0159
DOI10.1002/sdtp.17918

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Abstract The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of ESC (Electrostatic Chuck) used for dry etching.
AbstractList The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of ESC (Electrostatic Chuck) used for dry etching.
Author Wang, Guangjun
Liu, Bo
Huang, Jian
Xiong, Yong
Gao, Caiyong
Tan, Luolin
Xiang, Lei
Wen, Huiming
Author_xml – sequence: 1
  givenname: Huiming
  surname: Wen
  fullname: Wen, Huiming
  organization: Chongqing BOE Optoelectronics Technology Co., Ltd
– sequence: 2
  givenname: Lei
  surname: Xiang
  fullname: Xiang, Lei
  organization: Chongqing BOE Optoelectronics Technology Co., Ltd
– sequence: 3
  givenname: Guangjun
  surname: Wang
  fullname: Wang, Guangjun
  organization: Chongqing BOE Optoelectronics Technology Co., Ltd
– sequence: 4
  givenname: Yong
  surname: Xiong
  fullname: Xiong, Yong
  organization: Chongqing BOE Optoelectronics Technology Co., Ltd
– sequence: 5
  givenname: Caiyong
  surname: Gao
  fullname: Gao, Caiyong
  organization: Chongqing BOE Optoelectronics Technology Co., Ltd
– sequence: 6
  givenname: Bo
  surname: Liu
  fullname: Liu, Bo
  organization: Chongqing BOE Optoelectronics Technology Co., Ltd
– sequence: 7
  givenname: Jian
  surname: Huang
  fullname: Huang, Jian
  organization: Chongqing BOE Optoelectronics Technology Co., Ltd
– sequence: 8
  givenname: Luolin
  surname: Tan
  fullname: Tan, Luolin
  organization: Chongqing BOE Optoelectronics Technology Co., Ltd
BookMark eNp9kMFKw0AQhhepYFu9-AQL3oTU2aTJ7nqTalUoWGgE8bKkm4mmJNm6myi9-Qg-o0_i1nj2NMPPN_P__CMyaEyDhJwymDCA8MLl7XbCuGTigAxDlogAWCwHZAggeSCT5OmIjJzbAETRdCqHZLX8_vxiwC7pM1rjd21cS52purY0DS2Mpek8pcuswYp6M08UZVVT19ki00hda7F5aV9pWW-teccam_aYHBZZ5fDkb47J4_wmnd0Fi4fb-9nVItAMYhHoNcgMtPZRRFJwCLVmgkMSZRkiRhIwh8SrgoeiYEzEmK9xLQvGvZLzPBqTs_6vd37r0LVqYzrbeEsVgYhlEnEeeuq8p7Q1zlks1NaWdWZ3ioHal6b2panf0jzMevijrHD3D6lW1-myv_kBB9Vzcg
ContentType Journal Article
Copyright 2024 The Society for Information Display
Copyright_xml – notice: 2024 The Society for Information Display
DBID AAYXX
CITATION
7SC
7SP
8FD
JQ2
L7M
L~C
L~D
DOI 10.1002/sdtp.17918
DatabaseName CrossRef
Computer and Information Systems Abstracts
Electronics & Communications Abstracts
Technology Research Database
ProQuest Computer Science Collection
Advanced Technologies Database with Aerospace
Computer and Information Systems Abstracts – Academic
Computer and Information Systems Abstracts Professional
DatabaseTitle CrossRef
Technology Research Database
Computer and Information Systems Abstracts – Academic
Electronics & Communications Abstracts
ProQuest Computer Science Collection
Computer and Information Systems Abstracts
Advanced Technologies Database with Aerospace
Computer and Information Systems Abstracts Professional
DatabaseTitleList
CrossRef
Technology Research Database
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 2168-0159
EndPage 1777
ExternalDocumentID 10_1002_sdtp_17918
SDTP17918
Genre article
GroupedDBID .4S
05W
0R~
1OC
31~
33P
3SF
50Y
52U
8-1
A00
AAESR
AAEVG
AAHHS
AAHQN
AAMNL
AANHP
AANLZ
AAONW
AASGY
AAXRX
AAYCA
AAZKR
ABCUV
ABDPE
ABJNI
ACAHQ
ACBWZ
ACCFJ
ACCZN
ACGFS
ACPOU
ACRPL
ACXBN
ACXQS
ACYXJ
ADBBV
ADEOM
ADIZJ
ADMGS
ADNMO
ADOZA
ADXAS
AEEZP
AEIGN
AEIMD
AEQDE
AEUYR
AFBPY
AFFNX
AFFPM
AFGKR
AFPWT
AFWVQ
AFZJQ
AHBTC
AITYG
AIURR
AIWBW
AJBDE
AJXKR
ALMA_UNASSIGNED_HOLDINGS
ALUQN
ALVPJ
AMBMR
AMYDB
ARCSS
ASPBG
ATUGU
AUFTA
AVWKF
AZFZN
AZVAB
BDRZF
BFHJK
BHBCM
BMNLL
BMXJE
BNHUX
BOGZA
BRXPI
DCZOG
DPXWK
DRFUL
DRSTM
EBS
EJD
FEDTE
G-S
GODZA
HGLYW
HSZ
HVGLF
HZ~
LATKE
LEEKS
LITHE
LOXES
LUTES
LYRES
MEWTI
MRFUL
MRSTM
MSFUL
MSSTM
MXFUL
MXSTM
MY~
O66
O9-
P2W
R.K
ROL
SUPJJ
TUS
WBKPD
WIH
WIK
WLBEL
WOHZO
WXSBR
WYISQ
WYJ
ZZTAW
AAYXX
ADMLS
AEYWJ
AGHNM
AGQPQ
AGYGG
CITATION
7SC
7SP
8FD
AAMMB
AEFGJ
AGXDD
AIDQK
AIDYY
JQ2
L7M
L~C
L~D
ID FETCH-LOGICAL-c1058-cb09a0cc03386f702cc187063aaeee390ed0602c8728f1185edbeb9f17872d7d3
ISSN 0097-966X
IngestDate Fri Jul 25 11:55:27 EDT 2025
Tue Jul 01 02:09:09 EDT 2025
Wed Jan 22 17:17:28 EST 2025
IsPeerReviewed true
IsScholarly true
Issue 1
Language English
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c1058-cb09a0cc03386f702cc187063aaeee390ed0602c8728f1185edbeb9f17872d7d3
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
PQID 3085963772
PQPubID 2034401
PageCount 3
ParticipantIDs proquest_journals_3085963772
crossref_primary_10_1002_sdtp_17918
wiley_primary_10_1002_sdtp_17918_SDTP17918
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate June 2024
2024-06-00
20240601
PublicationDateYYYYMMDD 2024-06-01
PublicationDate_xml – month: 06
  year: 2024
  text: June 2024
PublicationDecade 2020
PublicationPlace Campbell
PublicationPlace_xml – name: Campbell
PublicationTitle SID International Symposium Digest of technical papers
PublicationYear 2024
Publisher Wiley Subscription Services, Inc
Publisher_xml – name: Wiley Subscription Services, Inc
References 2005
(e_1_2_1_2_1) 2005
References_xml – year: 2005
– volume-title: Effect of Cr3C2 and (W, Ti) C On the Vickers Hardness of Al2O3/Cr3C2/ (W, Ti) C Ceramic Composites; Deming Sun; <Material Engineering>;
  year: 2005
  ident: e_1_2_1_2_1
SSID ssj0033449
Score 2.3260965
Snippet The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of...
SourceID proquest
crossref
wiley
SourceType Aggregation Database
Index Database
Publisher
StartPage 1775
SubjectTerms ESC for dry etching
Screens
Withstand drop strength
Zero-cost
Title P‐101: Zero‐cost solution for TFT Panel non‐film surface strength improvement
URI https://onlinelibrary.wiley.com/doi/abs/10.1002%2Fsdtp.17918
https://www.proquest.com/docview/3085963772
Volume 55
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1bb9MwFLbK9gIPiKsoDGQJnqgykjjXvU10VUHdqJRUBF6iOHFK0ZpWaTIJnvgJ_BR-E7-E40suQ9M0eIncI8tyfT77nGMff0boFZ9EhBCqkQRmk2WwDOYcZZqRm67nODRlgq7p9MyZLqz3kR0NBr96WUt1RQ_T71feK_kfrYIM9Mpvyf6DZttGQQBl0C98QcPwvZGO522qAkCex_afWblpZelmV42aDoh0wnASgstYsPMRBP1tvXx1vh7t6jJPBN1syYpl9YVfnyw3F11ijHJgg3fjv3YRg29rnvlVr9Vhlcg6EMywXP3bZMu6A6OPcpGb1vwtsWUjjVZq03rGVt0GvxQBhIvl17ro6qoc4k8b1YDasjCtLrXqhgtjf8X2Xc4gGkl7JWSm4fAEPMUkrlZxSfZ7Ca1ySTZc-TSLMu_w073SdEgq2l1WbQ85ZavXGcgmKeDsQzxZzGZxeBKFt9C-6bo8MWD_eHw6CxrrT4ilQi7V75YS13zTtX3ZCeoim358JByc8B66qyITfCxhdh8NWPEA3enxVT5Ewfz3j58AtSPMgQZlDjHcQAwDxDBADAuIYYAY1ODgwgpcuAEX7oHrEVpMTsK3U029yqGl4It7Wkp1P9HTFP6q5-SubqapwQ_LSZIwxoivs0x3QOq5ppdD-GqzjDLq5waYBjNzM_IY7UEP2BOEwbVPTd_Ofdu3wUlKPCfTiZUQJ8ktSqg-RC-bYYq3knwlljTbZswHMxaDOUQHzQjGanLuYsKJ-xwCseMQvRajek0LcTAO56L09Pq2nqHbHZ4P0F5V1uw5OKUVfaFw8AfIw454
linkProvider EBSCOhost
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=P%E2%80%90101%3A+Zero%E2%80%90cost+solution+for+TFT+Panel+non%E2%80%90film+surface+strength+improvement&rft.jtitle=SID+International+Symposium+Digest+of+technical+papers&rft.au=Wen%2C+Huiming&rft.au=Xiang%2C+Lei&rft.au=Wang%2C+Guangjun&rft.au=Xiong%2C+Yong&rft.date=2024-06-01&rft.pub=Wiley+Subscription+Services%2C+Inc&rft.issn=0097-966X&rft.eissn=2168-0159&rft.volume=55&rft.issue=1&rft.spage=1775&rft.epage=1777&rft_id=info:doi/10.1002%2Fsdtp.17918&rft.externalDBID=NO_FULL_TEXT
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0097-966X&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0097-966X&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0097-966X&client=summon