P‐101: Zero‐cost solution for TFT Panel non‐film surface strength improvement

The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of...

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Bibliographic Details
Published inSID International Symposium Digest of technical papers Vol. 55; no. 1; pp. 1775 - 1777
Main Authors Wen, Huiming, Xiang, Lei, Wang, Guangjun, Xiong, Yong, Gao, Caiyong, Liu, Bo, Huang, Jian, Tan, Luolin
Format Journal Article
LanguageEnglish
Published Campbell Wiley Subscription Services, Inc 01.06.2024
Subjects
ESC for dry etching
Screens
Withstand drop strength
Zero-cost
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ISSN0097-966X
2168-0159
DOI10.1002/sdtp.17918

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Summary:The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of ESC (Electrostatic Chuck) used for dry etching.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
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ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.17918