P‐161: Full‐in‐situ Imaging and Laser Processing System Supporting Detection and Removal of Defective Micro‐LED Dies During Mass Transfer

Micro‐LEDs have been hailed as the next‐generation display technology, with mass transfer being the key to achieving mass production of Micro‐LED displays. During the mass transfer process, it is crucial to identify and remove defective dies in order to ensure high yield and optimal display performa...

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Bibliographic Details
Published inSID International Symposium Digest of technical papers Vol. 55; no. 1; pp. 1994 - 1996
Main Authors Cao, Yuxuan, Yang, Kuai, Zhang, Zhen
Format Journal Article
LanguageEnglish
Published Campbell Wiley Subscription Services, Inc 01.06.2024
Subjects
Display devices
fault dies detection and removal
galvanometer scanner
in‐situ observation and processing
laser mass transfer
Laser processing
Light emitting diodes
Mass production
Mass transfer
Micro‐LED
Misalignment
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Summary:Micro‐LEDs have been hailed as the next‐generation display technology, with mass transfer being the key to achieving mass production of Micro‐LED displays. During the mass transfer process, it is crucial to identify and remove defective dies in order to ensure high yield and optimal display performance. In this paper, a novel in‐situ observation, imaging, and laser processing system is proposed, enabling online, in‐situ, and zero‐misalignment removal of faulty dies during the mass transfer process. This system holds great promise for significantly improving the efficiency of mass transfer and further driving the realization of mass production for Micro‐LED displays.
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ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.17987