High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 50; no. 11R; p. 117301
Main Authors Hattori, Kei, Osato, Masaaki, Maeda, Takeshi, Okumura, Katsuya, Sekine, Makoto, Hori, Masaru
Format Journal Article
LanguageEnglish
Published 01.11.2011
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.50.117301