P‐209: Research on Adhesion of Acrylic Photoresist on Different Substrates for OLED Display

Acrylic photoresist could be applied as a functional layer for OLED display, and it is required to be fabricated mainly on the hybrid substrate of metal and inorganic silicide substrate or the polymer substrate. Through simulation, this paper concludes that moderately increasing the silane coupling...

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Bibliographic Details
Published inSID International Symposium Digest of technical papers Vol. 55; no. 1; pp. 2177 - 2180
Main Authors Shen, Ying, Xiao, Weikang, Li, Chenzhe, Zhu, Xiujian
Format Journal Article
LanguageEnglish
Published Campbell Wiley Subscription Services, Inc 01.06.2024
Subjects
Acrylic photoresistphotoresist
Adhesion
adhesion force
Coupling agents
Crosslinking
crosslinking degree
Hybrid systems
OLED display display
Peeling
Photoresists
Polymers
silane coupling agent
Silanes
Silicides
simulation
Substrates
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Summary:Acrylic photoresist could be applied as a functional layer for OLED display, and it is required to be fabricated mainly on the hybrid substrate of metal and inorganic silicide substrate or the polymer substrate. Through simulation, this paper concludes that moderately increasing the silane coupling agent content and moderate crosslinking degree of the material system could contribute to improving the adhesion force at the interface between acrylic photoresist and substrate, thereby avoiding peeling. Four acrylic photoresists named OC1‐4 with different formula are introduced, their adhesion force and peeling performances on different substrates are researched. The experimental results are consistent with that of simulation. Among them, OC1&4 with high content of silane coupling agent did not exhibit peeling on the hybrid substrate and polymer substrate, and their adhesion forces are large enough, making them suitable as functional layers for OLED display.
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ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.18040