Spectral methods of studying the mechanism and kinetics of the process of plasma-chemical destruction of photoresist

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Bibliographic Details
Published in	Journal of applied spectroscopy Vol. 32; no. 2; pp. 116 - 120
Main Authors	Nikiforenko, N. N., Labuda, A. A., Bosyakov, M. N.
Format	Journal Article
Language	English
Published	01.02.1980
Online Access	Get full text

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ISSN:	0021-9037 1573-8647
DOI:	10.1007/BF00610498