Orientation selective epitaxial growth of CeO 2 layers on Si(1 0 0) substrates using reactive DC magnetron sputtering with substrate bias
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Published in | Journal of crystal growth Vol. 271; no. 1-2; pp. 176 - 183 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
01.10.2004
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Online Access | Get full text |
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ISSN: | 0022-0248 |
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DOI: | 10.1016/j.jcrysgro.2004.07.052 |