Room-temperature formation of Pt 3 Si/Pt 2 Si films on poly-Si substrates

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 816; p. 12011
Main Authors Mironov, S A, Dubkov, V P, Chizh, K V, Yuryev, V A
Format Journal Article
LanguageEnglish
Published 01.03.2017
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ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/816/1/012011