Pore formation in p-type silicon in solutions containing different types of alcohol

• Published in: Nanoscale research letters Vol. 7; no. 1; p. 329
• Main Authors: Urata, Tomoko, Fukami, Kazuhiro, Sakka, Tetsuo, Ogata, Yukio H
• Format: Journal Article
• Language: English
• Published: New York Springer New York 21.06.2012; BioMed Central Ltd; Springer
• Subjects: Chemistry and Materials Science; Materials Science; Molecular Medicine; Nano Express; Nanochemistry; Nanoscale Science and Technology; Nanotechnology; Nanotechnology and Microengineering; Porous Semiconductors - Science and Technology 2012; Porous Layer; Pore Wall; Porous Silicon; Hydrogen Fluoride; Et2O

Macroporous structure of silicon can be obtained with anodization in hydrogen fluoride (HF) solution. The macropore formation in the presence of alcohol was studied. Macroporous layer formation in a low-concentration HF solution is stabilized with the increasing number of carbon in alcohol. The diss...