Grazing incidence interferometry for rough convex aspherics

Grazing incidence interferometry has been applied to rough planar and cylindrical surfaces. As suitable beam splitters diffractive optical phase elements are quite common because these allow for the same test sensitivity for all surface points. But a rotational-symmetric convex aspheric has two curv...

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Bibliographic Details
Main Authors Schwider, Johannes, Kellermann, Christine, Lindlein, Norbert, Rothau, Sergej, Mantel, Klaus
Format Journal Article
LanguageEnglish
Published 23.12.2016
Subjects
Physics - Optics
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Summary:Grazing incidence interferometry has been applied to rough planar and cylindrical surfaces. As suitable beam splitters diffractive optical phase elements are quite common because these allow for the same test sensitivity for all surface points. But a rotational-symmetric convex aspheric has two curvatures which reduces the measurable region to a meridian through the vortex of the aspheric, which is in contrast to cylindrical surfaces having a one-dimensional curvature which allows the test of the whole surface in gracing incidence. The meridional limitation for rotational-symmetric aspherics nevertheless offers the possibility to measure single meridians in a one-step measurement. An extension to the complete surface can be obtained by rotating the aspheric around its vortex within the frame of the test interferometer.
DOI:10.48550/arxiv.1612.08046