3D-Printed Optics for Wafer-Scale Probing

Mass production of photonic integrated circuits requires high-throughput wafer-level testing. We demonstrate that optical probes equipped with 3D-printed elements allow for efficient coupling of light to etched facets of nanophotonic waveguides. The technique is widely applicable to different integr...

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Bibliographic Details
Main Authors Trappen, Mareike, Blaicher, Matthias, Dietrich, Philipp-Immanuel, Hoose, Tobias, Xu, Yilin, Billah, Muhammad Rodlin, Freude, Wolfgang, Koos, Christian
Format Journal Article
LanguageEnglish
Published 31.08.2018
Subjects
Physics - Applied Physics
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Summary:Mass production of photonic integrated circuits requires high-throughput wafer-level testing. We demonstrate that optical probes equipped with 3D-printed elements allow for efficient coupling of light to etched facets of nanophotonic waveguides. The technique is widely applicable to different integration platforms.
DOI:10.48550/arxiv.1808.10834