Scanning electron microscope optics and spectrometers

This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning el...

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Bibliographic Details
Main Author Khursheed, Anjam
Format eBook Book
LanguageEnglish
Published New Jersey World Scientific Publishing Co. Pte. Ltd 2010
World Scientific
World Scientific Publishing Company
WORLD SCIENTIFIC
WSPC
Edition1
Subjects
Electron Microscopy, Scanning, Tunnelling
Materials Science
Optical spectrometers
Scanning electron microscopes
Scanning electron microscopes > Design and construction
Spectrometer
Spectrometer > Design and construction
Spectrometer
Electron
Scanning Electron Microscope
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Summary:This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.
Bibliography:Includes bibliographical references (p. 385-398) and index
ISBN:9812836675
9789812836670
DOI:10.1142/7094