Membrane-based scanning force microscopy

We report the development of a scanning force microscope based on an ultra-sensitive silicon nitride membrane transducer. Our development is made possible by inverting the standard microscope geometry - in our instrument, the substrate is vibrating and the scanning tip is at rest. We present first t...

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Published inarXiv.org
Main Authors Hälg, David, Gisler, Thomas, Tsaturyan, Yeghishe, Catalini, Letizia, Grob, Urs, Marc-Dominik Krass, Héritier, Martin, Mattiat, Hinrich, Thamm, Ann-Katrin, Schirhagl, Romana, Langman, Eric C, Schliesser, Albert, Degen, Christian L, Eichler, Alexander
Format Paper Journal Article
LanguageEnglish
Published Ithaca Cornell University Library, arXiv.org 11.06.2020
Subjects
Atomic force microscopes
Atomic force microscopy
Membranes
Physics - Applied Physics
Physics - Mesoscale and Nanoscale Physics
Silicon nitride
Substrates
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Summary:We report the development of a scanning force microscope based on an ultra-sensitive silicon nitride membrane transducer. Our development is made possible by inverting the standard microscope geometry - in our instrument, the substrate is vibrating and the scanning tip is at rest. We present first topography images of samples placed on the membrane surface. Our measurements demonstrate that the membrane retains an excellent force sensitivity when loaded with samples and in the presence of a scanning tip. We discuss the prospects and limitations of our instrument as a quantum-limited force sensor and imaging tool.
ISSN:2331-8422
DOI:10.48550/arxiv.2006.06238