Efficacy of Boron Nitride Encapsulation against Plasma-Processing in van der Waals Heterostructures

• Published in: arXiv.org
• Main Authors: Kumar, Pawan, Figueroa, Kelotchi S, Foucher, Alexandre C, Kiyoung Jo, Acero, Natalia, Stach, Eric A, Jariwala, Deep
• Format: Paper Journal Article
• Language: English
• Published: Ithaca Cornell University Library, arXiv.org 15.11.2020
• Subjects: Amorphization; Argon; Boron nitride; Encapsulation; Energy storage; Heterostructures; Molybdenum disulfide; Optical properties; Photoluminescence; Physics - Applied Physics; Physics - Materials Science; Physics - Mesoscale and Nanoscale Physics; Physics - Plasma Physics; Plasmas (physics); Post-processing; Scanning transmission electron microscopy; Transition metal compounds; Two dimensional materials
• ISSN: 2331-8422
• DOI: 10.48550/arxiv.2011.07448

Two-dimensional (2D) transition metal dichalcogenides (TMDCs) are the subject of intense investigation for applications in optics, electronics, catalysis, and energy storage. Their optical and electronic properties can be significantly enhanced when encapsulated in an environment that is free of charge disorder. Because hexagonal boron nitride (h-BN) is atomically thin, highly-crystalline, and is a strong insulator, it is one of the most commonly used 2D materials to encapsulate and passivate TMDCs. In this report, we examine how ultrathin h-BN shields an underlying MoS2 TMDC layer from the energetic argon plasmas that are routinely used during semiconductor device fabrication and post-processing. Aberration-corrected Scanning Transmission Electron Microscopy is used to analyze defect formation in both the h-BN and MoS2 layers, and these observations are correlated with Raman and photoluminescence spectroscopy. Our results highlight that h-BN is an effective barrier for short plasma exposures (< 30 secs) but is ineffective for longer exposures, which result in extensive knock-on damage and amorphization in the underlying MoS2.