Low-K Nanoporous Interdielectrics Materials, Thin Film Fabrications, Structures and Properties
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Main Authors | , , |
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Format | eBook |
Language | English |
Published |
Hauppauge
Nova Science Publishers, Incorporated
2010
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Edition | 1 |
Subjects | |
Online Access | Get full text |
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ISBN: | 1616687495 9781616687496 |
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