Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon

The evolution is presented of infrared transmission spectra of hydrogenated and chlorinated amorphous silicon films versus the chlorine concentration and the annealing temperature. As the chlorine content increases, an increase of the 2100 cm-1 band intensity is observed. We associate this effect wi...

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Bibliographic Details
Published inarXiv.org
Main Authors Kalem, S, Mostefaoui, R, Bourneix, J, Chevallier, J
Format Paper Journal Article
LanguageEnglish
Published Ithaca Cornell University Library, arXiv.org 07.10.2021
Subjects
Amorphous silicon
Annealing
Chlorine
Hydrogenation
Infrared spectra
Physics - Materials Science
Silicon films
Spectrum analysis
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Summary:The evolution is presented of infrared transmission spectra of hydrogenated and chlorinated amorphous silicon films versus the chlorine concentration and the annealing temperature. As the chlorine content increases, an increase of the 2100 cm-1 band intensity is observed. We associate this effect with the existence of SiH2CI2, mixed configurations. The Sic1 stretching band, located at 545 cm-1 in unannealed samples, shifts continuously up to 590 cm-1 as the annealing temperature increases. This displacement is attributed to a predominance of SiCI2, species around 500{\deg}C and their transformation to SiCl, species and SiCl, molecules above 700{\deg}C.
ISSN:2331-8422
DOI:10.48550/arxiv.2110.03770