Graphene Squeeze-Film Pressure Sensors

The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such sensors, not only strong and flexible membranes are required,...

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Bibliographic Details
Published inarXiv.org
Main Authors Dolleman, Robin J, Davidovikj, Dejan, Cartamil-Bueno, Santiago J, Herre S J van der Zant, Steeneken, Peter G
Format Paper Journal Article
LanguageEnglish
Published Ithaca Cornell University Library, arXiv.org 23.10.2015
Subjects
Frequency shift
Graphene
Microelectromechanical systems
Physics - Mesoscale and Nanoscale Physics
Pressure dependence
Pressure sensors
Resonant frequencies
Sensors
Stiffness
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Summary:The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such sensors, not only strong and flexible membranes are required, but also minimization of the membrane's mass is essential to maximize responsivity. Here, we demonstrate the use of a few-layer graphene membrane as a squeeze-film pressure sensor. A clear pressure dependence of the membrane's resonant frequency is observed, with a frequency shift of 4 MHz between 8 and 1000 mbar. The sensor shows a reproducible response and no hysteresis. The measured responsivity of the device is 9000 Hz/mbar, which is a factor 45 higher than state-of-the-art MEMS-based squeeze-film pressure sensors while using a 25 times smaller membrane area.
ISSN:2331-8422
DOI:10.48550/arxiv.1510.06919