Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE

We demonstrate an atomic force microscopy based method for estimation of defect density by identification of threading dislocations on a non-flat surface resulting from metamorphic growth. The discussed technique can be applied as an everyday evaluation tool for the quality of epitaxial structures a...

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Bibliographic Details
Published inarXiv.org
Main Authors Gocalinska, Agnieszka, Manganaro, Marina, Dimastrodonato, Valeria, Pelucchi, Emanuele
Format Paper Journal Article
LanguageEnglish
Published Ithaca Cornell University Library, arXiv.org 03.06.2015
Subjects
Atomic force microscopy
Dislocation density
Flat surfaces
Microscopes
Optimization
Physics - Materials Science
Threading dislocations
Transmission electron microscopy
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Summary:We demonstrate an atomic force microscopy based method for estimation of defect density by identification of threading dislocations on a non-flat surface resulting from metamorphic growth. The discussed technique can be applied as an everyday evaluation tool for the quality of epitaxial structures and allow for cost reduction, as it lessens the amount of the transmission electron microscopy analysis required at the early stages of projects. Metamorphic structures with low surface defectivities (below 106) were developed successfully with the application of the technique, proving its usefulness in process optimisation.
ISSN:2331-8422
DOI:10.48550/arxiv.1506.01967