Interfacial Chemistries for Nanoscale Transfer Printing

We describe a patterning technique that uses self-assembled monolayers and other surface chemistries for guiding the transfer of material from relief features on a stamp to a substrate. This purely additive contact printing technique is capable of nanometer resolution. Pattern transfer is fast and i...

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Bibliographic Details
Published inJournal of the American Chemical Society Vol. 124; no. 26; pp. 7654 - 7655
Main Authors Loo, Yueh-Lin, Willett, Robert L, Baldwin, Kirk W, Rogers, John A
Format Journal Article
LanguageEnglish
Published Washington, DC American Chemical Society 03.07.2002
Subjects
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Physics
Surface treatments
Ethylene terephthalate polymer
Dimethylsiloxane polymer
Scanning electron microscopy
Silicon Organic compounds
Monolayers
Transfer printing
Organic silane
Surface treatments
Nanotechnology
Silicon polymer
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Summary:We describe a patterning technique that uses self-assembled monolayers and other surface chemistries for guiding the transfer of material from relief features on a stamp to a substrate. This purely additive contact printing technique is capable of nanometer resolution. Pattern transfer is fast and it occurs at ambient conditions. We illustrate the versatility of this method by printing single-layer metal patterns with feature sizes from a few tens of microns to a few tens of nanometers. We also demonstrate its use for patterning, in a single step, metal/dielectric/metal multilayers for functional thin film capacitors on plastic substrates.
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ObjectType-Article-1
SourceType-Scholarly Journals-1
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ISSN:0002-7863
1520-5126
DOI:10.1021/ja026355v