Structure and Electrochemical Properties of Carbon Films Prepared by a Electron Cyclotron Resonance Sputtering Method

This paper describes the characterization, electrochemical properties, and applications of carbon films prepared by the electron cyclotron resonance (ECR) sputtering method. The ECR-sputtered carbon film was deposited within several minutes at room temperature. The optimized sputtering conditions si...

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Published inAnalytical chemistry (Washington) Vol. 79; no. 1; pp. 98 - 105
Main Authors Jia, Jianbo, Kato, Dai, Kurita, Ryoji, Sato, Yukari, Maruyama, Kenichi, Suzuki, Koji, Hirono, Shigeru, Ando, Toshihiro, Niwa, Osamu
Format Journal Article
LanguageEnglish
Published Washington, DC American Chemical Society 01.01.2007
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Summary:This paper describes the characterization, electrochemical properties, and applications of carbon films prepared by the electron cyclotron resonance (ECR) sputtering method. The ECR-sputtered carbon film was deposited within several minutes at room temperature. The optimized sputtering conditions significantly change the film structure, which includes many more sp3 bonds (sp3 /sp2 = 0.702) than previously reported film (sp3 /sp2 = 0.274)1 with an extremely flat surface (0.7 Å). The ECR-sputtered carbon films exhibit excellent electrochemical properties. For example, they have nearly the same potential window in the positive direction as that of high-quality, boron-doped diamond (moderately doped, 1019−1020 boron atoms/cm3)2 and an even wider potential window in the negative direction with a low background current, high stability, and suppression of fouling by electroactive species without pretreatment. The electron-transfer rates at ECR-sputtered carbon films are similar to those of glassy carbon (GC) for Ru(NH3)6 2+/3+ and Fe(CN)6 3-/4-, whereas they are much slower than those of GC for Fe2+/3+, dopamine oxidation, and O2 reduction due to weak interactions between electroactive species and the ECR-sputtered carbon film surface. Such a response can be attributed to the ultraflat surface and low surface O/C ratios of ECR-sputtered carbon films. ECR-sputtered carbon film is advantageous for measuring biochemicals with high oxidation potentials because of its wide potential window and high stability. Highly reproducible and well-defined cyclic voltammograms were obtained for histamine and azide ions with a peak potential at 1.25 and 1.12 V vs Ag/AgCl, respectively. The film is very stable for continuous voltammetry measurements in 10 μM bisphenol A, which usually fouls the electrode surface with oxidation products.
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ISSN:0003-2700
1520-6882
DOI:10.1021/ac0610558