Plasma diagnostics for unraveling process chemistry

This review focuses on the use of diagnostic tools to examine plasma processing chemistry, primarily plasma species energetics, dynamics, and molecule-surface reactions. We describe the use of optical diagnostic tools, mass spectrometry, and Langmuir probes in measuring species densities, rotational...

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Bibliographic Details
Published inAnnual review of analytical chemistry (Palo Alto, Calif.) Vol. 1; p. 261
Main Authors Stillahn, Joshua M, Trevino, Kristina J, Fisher, Ellen R
Format Journal Article
LanguageEnglish
Published United States 01.01.2008
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Summary:This review focuses on the use of diagnostic tools to examine plasma processing chemistry, primarily plasma species energetics, dynamics, and molecule-surface reactions. We describe the use of optical diagnostic tools, mass spectrometry, and Langmuir probes in measuring species densities, rotational and kinetic energies, and plasma-surface reactions. Molecule-surface interactions for MX(n) species (M = C, Si, N; X = H, F, Cl) are presented and interpreted with respect to the molecule's electronic configuration and dipole moments.
ISSN:1936-1335
DOI:10.1146/annurev.anchem.1.031207.112953