Plasma diagnostics for unraveling process chemistry
This review focuses on the use of diagnostic tools to examine plasma processing chemistry, primarily plasma species energetics, dynamics, and molecule-surface reactions. We describe the use of optical diagnostic tools, mass spectrometry, and Langmuir probes in measuring species densities, rotational...
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Published in | Annual review of analytical chemistry (Palo Alto, Calif.) Vol. 1; p. 261 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
United States
01.01.2008
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Online Access | Get more information |
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Summary: | This review focuses on the use of diagnostic tools to examine plasma processing chemistry, primarily plasma species energetics, dynamics, and molecule-surface reactions. We describe the use of optical diagnostic tools, mass spectrometry, and Langmuir probes in measuring species densities, rotational and kinetic energies, and plasma-surface reactions. Molecule-surface interactions for MX(n) species (M = C, Si, N; X = H, F, Cl) are presented and interpreted with respect to the molecule's electronic configuration and dipole moments. |
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ISSN: | 1936-1335 |
DOI: | 10.1146/annurev.anchem.1.031207.112953 |