Ultrathin Single Crystal Diamond Nanomechanical Dome Resonators

• Published in: Nano letters Vol. 11; no. 10; pp. 4304 - 4308
• Main Authors: Zalalutdinov, Maxim K, Ray, Matthew P, Photiadis, Douglas M, Robinson, Jeremy T, Baldwin, Jeffrey W, Butler, James E, Feygelson, Tatyana I, Pate, Bradford B, Houston, Brian H
• Format: Journal Article
• Language: English
• Published: Washington, DC American Chemical Society 12.10.2011
• Subjects: Applied sciences; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Diamonds; Dissipation factor; Domes; Electronics; Exact sciences and technology; Fullerenes and related materials; diamonds, graphite; Materials science; Micro- and nanoelectromechanical devices (mems/nems); Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals; Nanostructure; Origins; Physics; Quality factor; Radio frequencies; Resonators; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Single crystals; Specific materials; Structure of solids and liquids; crystallography; single-crystal; Diamond; nanomechanical; dissipation; resonator; Temperature dependence; Monocrystals; Quality factor; Diamonds; Nanoelectromechanical device; Diamond structure; Nanotechnology; Nanomechanical resonator; Crystal structure
• ISSN: 1530-6984; 1530-6992
• DOI: 10.1021/nl202326e

We present the first nanomechanical resonators microfabricated in single-crystal diamond. Shell-type resonators only 70 nm thick, the thinnest single crystal diamond structures produced to date, demonstrate a high-quality factor (Q ≈ 1000 at room temperature, Q ≈ 20 000 at 10 K) at radio frequencies (50–600 MHz). Quality factor dependence on temperature and frequency suggests an extrinsic origin to the dominant dissipation mechanism and methods to further enhance resonator performance.