New Algorithmic Techniques for Complex EDA Problems
[...]the sixth paper "Line search-based inverse lithography technique for mask design" by X. Zhao and C. Chu, presents a novel enhanced mask design method via a highly efficient gradient-basedsearch technique that results in fewer pattern errors than previous work;it thus also reduces vari...
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Published in | VLSI Design Vol. 2014; no. 2014; pp. 4 - 5 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
New York
Hindawi Limiteds
01.01.2014
Hindawi Publishing Corporation Hindawi Limited |
Subjects | |
Online Access | Get full text |
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Summary: | [...]the sixth paper "Line search-based inverse lithography technique for mask design" by X. Zhao and C. Chu, presents a novel enhanced mask design method via a highly efficient gradient-basedsearch technique that results in fewer pattern errors than previous work;it thus also reduces variability. |
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ISSN: | 1065-514X 1563-5171 |
DOI: | 10.1155/2014/134946 |