New Algorithmic Techniques for Complex EDA Problems

[...]the sixth paper "Line search-based inverse lithography technique for mask design" by X. Zhao and C. Chu, presents a novel enhanced mask design method via a highly efficient gradient-basedsearch technique that results in fewer pattern errors than previous work;it thus also reduces vari...

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Bibliographic Details
Published inVLSI Design Vol. 2014; no. 2014; pp. 4 - 5
Main Authors Dutt, Shantanu, Mehta, Dinesh, Nam, Gi-Joon
Format Journal Article
LanguageEnglish
Published New York Hindawi Limiteds 01.01.2014
Hindawi Publishing Corporation
Hindawi Limited
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Summary:[...]the sixth paper "Line search-based inverse lithography technique for mask design" by X. Zhao and C. Chu, presents a novel enhanced mask design method via a highly efficient gradient-basedsearch technique that results in fewer pattern errors than previous work;it thus also reduces variability.
ISSN:1065-514X
1563-5171
DOI:10.1155/2014/134946