"Tailored" organometallics as precursors for the chemical vapor deposition of high-purity palladium and platinum thin films

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Bibliographic Details
Published inJournal of the American Chemical Society Vol. 110; no. 8; pp. 2688 - 2689
Main Authors Gozum, John E, Pollina, Deborah M, Jensen, James A, Girolami, Gregory S
Format Journal Article
LanguageEnglish
Published Washington, DC American Chemical Society 01.04.1988
Subjects
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Electrical conductivity
Molecular structure
Transition metal Compounds
Palladium Organic compounds
Organometallic compound
Experimental study
X ray diffraction
Chemical vapor deposition
Thin film
Crystalline structure
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Bibliography:istex:CA23A8E5868E095CFB93B8E14377B5D23351066C
ark:/67375/TPS-ZCWQ1WQB-G
ISSN:0002-7863
1520-5126
DOI:10.1021/ja00216a073