Nano-optomechanical Resonators for Sensitive Pressure Sensing

• Published in: ACS applied materials & interfaces Vol. 14; no. 34; pp. 39211 - 39219
• Main Authors: Chen, Yanping, Liu, Shen, Hong, Guiqing, Zou, Mengqiang, Liu, Bonan, Luo, Junxian, Wang, Yiping
• Format: Journal Article
• Language: English
• Published: American Chemical Society 31.08.2022
• Subjects: Functional Nanostructured Materials (including low-D carbon); pressure sensor; nano-optomechanical; fiber optic sensors; graphene; gas damping
• ISSN: 1944-8244; 1944-8252
• DOI: 10.1021/acsami.2c09865

Nanomechanical sensors made from suspended graphene are sensitive to pressure changes. However, these devices typically function by obtaining an electrical signal based on the static displacement of a suspended graphene membrane and so, in practice, have limited sensitivity and operational range. The present work demonstrates an optomechanical Au/graphene membrane-based gas pressure sensor with ultrahigh sensitivity. This sensor comprises a suspended Au/graphene membrane appended to a section of hollow-core fiber to form a sealed Fabry–Pérot cavity. In contrast to conventional nanomechanical pressure sensors, pressure changes are monitored via resonant sensing with an optical readout. A miniature pressure sensor based on this principle was able to detect an ultrasmall pressure difference of 1 × 10–7 mbar in the ultrahigh-vacuum region with a pressure range of 4.1 × 10–5 to 8.3 × 10–6 mbar. Furthermore, this pressure sensor can work over an extended pressure range of 7 × 10–6 mbar to 1000 mbar at room temperature, outperforming commercial pressure sensors. Similar results were obtained using both the fundamental and higher-order resonant frequencies but with the latter providing improved sensitivity. This sensor has a wide range of potential applications, including indoor navigation, altitude monitoring, and motion detection.