Surface Passivation of Efficient Nanotextured Black Silicon Solar Cells Using Thermal Atomic Layer Deposition

• Published in: ACS applied materials & interfaces Vol. 5; no. 19; pp. 9752 - 9759
• Main Authors: Wang, Wei-Cheng, Lin, Che-Wei, Chen, Hsin-Jui, Chang, Che-Wei, Huang, Jhih-Jie, Yang, Ming-Jui, Tjahjono, Budi, Huang, Jian-Jia, Hsu, Wen-Ching, Chen, Miin-Jang
• Format: Journal Article
• Language: English
• Published: United States American Chemical Society 09.10.2013
• Subjects: aluminum oxide (Al2O3); silicon nanowire; surface passivation; atomic layer deposition; nanotextured black silicon; solar cell

Efficient nanotextured black silicon solar cells passivated by an Al2O3 layer are demonstrated. The broadband antireflection of the nanotextured black silicon solar cells was provided by fabricating vertically aligned silicon nanowire (SiNW) arrays on the n + emitter. A highly conformal Al2O3 layer...