High-Throughput Two-Photon 3D Printing Enabled by Holographic Multi-Foci High-Speed Scanning

• Published in: Nano letters Vol. 24; no. 8; pp. 2671 - 2679
• Main Authors: Zhang, Leran, Wang, Chaowei, Zhang, Chenchu, Xue, Yuhang, Ye, Zhaohui, Xu, Liqun, Hu, Yanlei, Li, Jiawen, Chu, Jiaru, Wu, Dong
• Format: Journal Article
• Language: English
• Published: United States American Chemical Society 28.02.2024
• Subjects: high-throughput 3D printing; functional microstructure; femtosecond laser; parallel processing; holographic multifoci
• ISSN: 1530-6984; 1530-6992
• DOI: 10.1021/acs.nanolett.4c00505

The emerging two-photon polymerization (TPP) technique enables high-resolution printing of complex 3D structures, revolutionizing micro/nano additive manufacturing. Various fast scanning and parallel processing strategies have been proposed to promote its efficiency. However, obtaining large numbers of uniform focal spots for parallel high-speed scanning remains challenging, which hampers the realization of higher throughput. We report a TPP printing platform that combines galvanometric mirrors and liquid crystal on silicon spatial light modulator (LCoS-SLM). By setting the target light field at LCoS-SLM’s diffraction center, sufficient energy is acquired to support simultaneous polymerization of over 400 foci. With fast scanning, the maximum printing speed achieves 1.49 × 108 voxels s–1, surpassing the existing scanning-based TPP methods while maintaining high printing resolution and flexibility. To demonstrate the processing capability, functional 3D microstructure arrays are rapidly fabricated and applied in micro-optics and micro-object manipulation. Our method may expand the prospects of TPP in large-scale micro/nanomanufacturing.