High-Temperature Nucleation of GaP on V‑Grooved Si
The use of nanopatterned {111}-faceted v-grooves has recently shown promise for growing high-quality III–V material on Si. Here, we study the effect of reactor conditions and surface pretreatments on the nucleation of GaP on v-grooved Si in a high-temperature regime, which offers the promise of a de...
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Published in | Crystal growth & design Vol. 20; no. 10; pp. 6745 - 6751 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
United States
American Chemical Society
07.10.2020
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Subjects | |
Online Access | Get full text |
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Summary: | The use of nanopatterned {111}-faceted v-grooves has recently shown promise for growing high-quality III–V material on Si. Here, we study the effect of reactor conditions and surface pretreatments on the nucleation of GaP on v-grooved Si in a high-temperature regime, which offers the promise of a defect-free GaP/Si interface favorable for Si passivation and dislocation glide in the GaP. X-ray photoelectron spectroscopy was used to understand the Si surface chemistry prior to nucleation, and transmission electron microscopy was used to probe material quality of the nuclei. Temperature and V/III ratio were found to control the facet selectivity of nucleation. We demonstrate a condition of high temperature and high V–III ratio that leads to uniform nucleation at the bottom of the trenches, with initial material free of nucleation-related interfacial defects. This optimized condition was then shown to coalesce into a thin film after additional growth. |
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Bibliography: | AC36-08GO28308 USDOE Office of Energy Efficiency and Renewable Energy (EERE) NREL/JA-5900-76081 |
ISSN: | 1528-7483 1528-7505 |
DOI: | 10.1021/acs.cgd.0c00875 |