Laser-Assisted Chemical Vapor Deposition of Graphite

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Bibliographic Details
Published inChemistry of materials Vol. 6; no. 11; pp. 1982 - 1985
Main Authors Tyndall, George W, Hacker, Nigel P
Format Journal Article
LanguageEnglish
Published Washington, DC American Chemical Society 01.11.1994
Subjects
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Physics
CVD
Characterization
Thin films
Raman spectra
Photolysis
Laser radiation
Nonmetals
Graphite
Crystal growth from vapors
Experimental study
Crystal growth methods
AES
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More Information
Bibliography:ark:/67375/TPS-K9SQ1F3N-D
istex:30DAF197A133E9830E5AA84F9C57ACD87AADF501
ISSN:0897-4756
1520-5002
DOI:10.1021/cm00047a016