Design of New Positive-Tone Photoresists Based on the Acid-Catalyzed Hydrolysis of Phenylmethanediol Diesters

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Bibliographic Details
Published inChemistry of materials Vol. 6; no. 10; pp. 1830 - 1837
Main Authors Lee, S. Ming, Frechet, Jean M. J
Format Journal Article
LanguageEnglish
Published Washington, DC American Chemical Society 01.10.1994
Subjects
Applied sciences
Electrical, magnetic and optical properties
Exact sciences and technology
Organic polymers
Physicochemistry of polymers
Properties and characterization
Hydrolysis
Acid catalysis
Diester
Photoresist
Styrene derivative polymer
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Bibliography:istex:6EB59AB7A5479371EF9DD41C66513C0561AC436A
ark:/67375/TPS-2M1MWGCD-2
ISSN:0897-4756
1520-5002
DOI:10.1021/cm00046a042