A Simple, Low Cost Ink System for Drop-on-Demand Printing High Performance Metal Oxide Dielectric Film at Low Temperature

• Published in: ACS applied materials & interfaces Vol. 11; no. 5; pp. 5193 - 5199
• Main Authors: Zhu, Zhennan, Zhang, Jianhua, Zhou, ZhongWei, Ning, Honglong, Cai, Wei, Wei, Jinglin, Zhou, Shangxiong, Yao, Rihui, Lu, Xubing, Peng, Junbiao
• Format: Journal Article
• Language: English
• Published: United States American Chemical Society 06.02.2019
• Subjects: ink system; dielectric film; drop-on-demand printing; low temperature; low cost
• ISSN: 1944-8244; 1944-8252
• DOI: 10.1021/acsami.8b14328

We have successfully developed an ink system containing inexpensive raw materials through a simple process and have printed ZrO x dielectric film at a relatively low annealing temperature of 250 °C. The ZrO x dielectric film afforded a leakage current density of 5.4 × 10–6 A/cm2 at 1 MV/cm and a dielectric constant of 10 and shows a promising future for flexible electronics. The ink system shows a temperature-induced gelation behavior, and a gel network is formed when the temperature rises. A high concentration of oxide precursors is obtained near the network area through the absorption function of polymer groups, and thus oxide structure can be formed at a relatively low temperature due to the shorter diffusion path of precursor polymerization. The microstructure of the printed ZrO x film was investigated by high resolution transmission electron microscopy (HRTEM), Fourier-transform infrared spectroscopy (FT-IR), and X-ray photoelectron spectroscopy (XPS), and the effect of annealing temperature on film structure was studied.