Chemical Vapor Deposition of Spherical Amorphous Selenium Mie Resonators for Infrared Meta-Optics

• Published in: ACS applied materials & interfaces Vol. 14; no. 3; pp. 4612 - 4619
• Main Authors: Singh, Danveer, Poplinger, Michal, Twitto, Avraham, Snitkoff, Rafi, Nanikashvili, Pilkhaz, Azolay, Ori, Levi, Adi, Stern, Chen, Taguri, Gili Cohen, Albo, Asaf, Naveh, Doron, Lewi, Tomer
• Format: Journal Article
• Language: English
• Published: United States American Chemical Society 26.01.2022
• Subjects: Surfaces, Interfaces, and Applications; nanoparticles; selenium; epsilon-near-zero; Mie-resonators; CVD growth; high-quality-factor resonances; meta-optics
• ISSN: 1944-8244; 1944-8252
• DOI: 10.1021/acsami.1c17812

Applying direct growth and deposition of optical surfaces holds great promise for the advancement of future nanophotonic technologies. Here, we report on a chemical vapor deposition (CVD) technique for depositing amorphous selenium (a-Se) spheres by desorption of selenium from Bi2Se3 and re-adsorption on the substrate. We utilize this process to grow scalable, large area Se spheres on several substrates and characterize their Mie-resonant response in the mid-infrared (MIR) spectral range. We demonstrate size-tunable Mie resonances spanning the 2–16 μm spectral range for single isolated resonators and large area ensembles. We further demonstrate strong absorption dips of up to 90% in ensembles of particles in a broad MIR range. Finally, we show that ultra-high-Q resonances arise in the case where Se Mie-resonators are coupled to low-loss epsilon-near-zero (ENZ) substrates. These findings demonstrate the enabling potential of amorphous Selenium as a versatile and tunable nanophotonic material that may open up avenues for on-chip MIR spectroscopy, chemical sensing, spectral imaging, and large area metasurface fabrication.