Micro Mechanical Transducers - Pressure Sensors, Accelerometers and Gyroscopes

Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started se...

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Bibliographic Details
Main Author Bao, Min-Hang
Format eBook Book
LanguageEnglish
Published Amsterdam Elsevier 2000
Elsevier Science B.V
Elsevier Science & Technology
Elsevier Science
Edition1
SeriesHandbook of sensors and actuators
Subjects
Electronics & Semiconductors
Microelectromechanical systems
Microelectromechanical systems Handbooks, manuals, etc
Sensors Technology
Transducers
Transducers Handbooks, manuals, etc
Online AccessGet full text
ISBN044450558X
9780444505583

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Summary:Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products.
Bibliography:Includes bibliographical references and index
ISBN:044450558X
9780444505583