Handbook of Ellipsometry

The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated c...

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Bibliographic Details
Main Authors Tompkins, Harland G., Irene, Eugene A.
Format eBook Book
LanguageEnglish
Published Norwich, N.Y William Andrew Publishing/Noyes 2005
Heidelberg Springer
W. Andrew Pub
Elsevier Science & Technology Books
Springer-Verlag
William Andrew Pub
Edition1
Subjects
Chemical spills
Electronics & Semiconductors
Ellipsometry
Properties & Testing
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Summary:The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale.
Bibliography:Includes bibliographical references and index
Available also in a print ed.
Mode of access: Internet via World Wide Web.
Title from title screen.
ISBN:0815514999
9780815514992
9783540222934
3540222936