Fundamental Principles of Engineering Nanometrology

The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents o...

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Bibliographic Details
Main Author Leach, Richard
Format eBook Book
LanguageEnglish
Published Amsterdam Elsevier 2010
William Andrew / Elsevier
Elsevier Science & Technology Books
William Andrew
Edition1
SeriesMicro and Nano Technologies
Subjects
Metrology
Microtechnology
Nanodevices
Nanostructures & Micro
Nanotechnology
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Summary:The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. In this book the author makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialization of nanotechnology and measurement processes requiring accuracy at the nanoscale.
Bibliography:Includes bibliographical references and index
ISBN:9780080964546
0080964540
DOI:10.1016/C2009-0-20339-4