Vertically Aligned Nanopillar Arrays with Hard Skins Using Anodic Aluminum Oxide for Nano Imprint Lithography

• Published in: Chemistry of materials Vol. 17; no. 24; pp. 6181 - 6185
• Main Authors: Lee, Pyung-Soo, Lee, Ok-Joo, Hwang, Sun-Kyu, Jung, Seung-Ho, Jee, Sang Eun, Lee, Kun-Hong
• Format: Journal Article
• Language: English
• Published: American Chemical Society 29.11.2005

Master molds with nano-pillar structures were fabricated by using anodic aluminum oxide (AAO) for nano-imprint lithography (NIL). The proposed method consists of (1) AAO fabrication, (2) transfer of the thin AAO layer onto a substrate, (3) aluminum sputtering, (4) aluminum melting, and (5) removal o...