Vertically Aligned Nanopillar Arrays with Hard Skins Using Anodic Aluminum Oxide for Nano Imprint Lithography
Master molds with nano-pillar structures were fabricated by using anodic aluminum oxide (AAO) for nano-imprint lithography (NIL). The proposed method consists of (1) AAO fabrication, (2) transfer of the thin AAO layer onto a substrate, (3) aluminum sputtering, (4) aluminum melting, and (5) removal o...
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Published in | Chemistry of materials Vol. 17; no. 24; pp. 6181 - 6185 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
American Chemical Society
29.11.2005
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Online Access | Get full text |
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Summary: | Master molds with nano-pillar structures were fabricated by using anodic aluminum oxide (AAO) for nano-imprint lithography (NIL). The proposed method consists of (1) AAO fabrication, (2) transfer of the thin AAO layer onto a substrate, (3) aluminum sputtering, (4) aluminum melting, and (5) removal of the thin AAO layer. Since the sputtered aluminum penetrated into the porous alumina walls of the AAO template during the melting step, the pillars had skin layers of aluminum/alumina composite which added additional mechanical strength and chemical resistance. The diameter of a pillar in the nano-pillar master mold was larger than that of the hole diameter of the original AAO template because of the hard skin of aluminum/alumina composite layer which covers the pillar surface. The pillar structure could be used as a mold for NIL, resulting in a regular pore array on a polymer film. |
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Bibliography: | istex:6BBAA769FD8B95125EC90F585C11753B2CEDDD91 ark:/67375/TPS-7H9HQBF9-X |
ISSN: | 0897-4756 1520-5002 |
DOI: | 10.1021/cm051855j |