Improved Pattern Transfer in Soft Lithography Using Composite Stamps

Composite stamps composed of two layersa stiff layer supported by a flexible layerextend the capabilities of soft lithography to the generation of 50−100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042)...

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Bibliographic Details
Published inLangmuir Vol. 18; no. 13; pp. 5314 - 5320
Main Authors Odom, Teri W, Love, J. Christopher, Wolfe, Daniel B, Paul, Kateri E, Whitesides, George M
Format Journal Article
LanguageEnglish
Published American Chemical Society 25.06.2002
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Summary:Composite stamps composed of two layersa stiff layer supported by a flexible layerextend the capabilities of soft lithography to the generation of 50−100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniquesmicromolding in capillaries, microtransfer molding, and phase-shifting lithographycan be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).
Bibliography:istex:A44FF1B8C6D6CB02C39487B1672DB32AC884E910
ark:/67375/TPS-PT3F12GV-6
ISSN:0743-7463
1520-5827
DOI:10.1021/la020169l